17 Patents
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- US122116942025Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
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- US121319132024Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers
Applied Materials, Inc.
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- US117281682023Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- US116949022023Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers
Applied Materials, Inc.
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