Patents/Inventors

Kwang Seon Jin

Osan-siKR3 patents

3 Patents

US125387322026
Substrate Processing Apparatus and Substrate Processing Method
WONIK IPS CO., Ltd.
0 cites
US118759982024
Substrate Processing Method
WONIK IPS CO., Ltd.
0 cites
US117840292023
Method and Apparatus for Atomic Layer Etching
WONIK IPS CO., Ltd.
0 cites