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Inventors
Kwang Kuk Lee
Daejeon
KR
2 patents
2 Patents
US12146092
2024
Etching Composition, Method for Etching Insulating Film of Semiconductor Devices Using the Same and Method for Preparing Semiconductor Devices
SK Inc.
0 cites
US11643488
2023
Random Copolymer, Laminate, and Method for Forming Pattern
SK Innovation Co., Ltd.
0 cites