Patents/Inventors

Kuo-tai Teng

Poway, CAUS7 patents

5 Patents

US125977542026
Predictive Control of a Pulsed Light Beam
Cymer, LLC
0 cites
US125299622026
Method of Compensating Wavelength Error Induced by Repetition Rate Deviation
Cymer, LLC
0 cites
US124383342025
Apparatus for and Method of Modulating a Light Source Wavelength
Cymer, LLC
0 cites
US118600362024
Determination of Measurement Error in an Etalon
Cymer, LLC
0 cites
US118031262023
Method of Compensating Wavelength Error Induced by Repetition Rate Deviation
Cymer, LLC
0 cites