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Inventors
Kuo-chang Kau
Yuanli Township
TW
3 patents
3 Patents
US12308233
2025
Dual Critical Dimension Patterning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US11921434
2024
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US11740563
2023
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites