Patents/Inventors

Kuntack Lee

Suwon-siKR23 patents

21 Patents

US126107762026
Substrate Processing Apparatus, Substrate Processing Method, and Method of Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125786472026
Substrate Rotating Apparatus, Substrate Processing System Including the Same, and Substrate Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124630612025
Wafer Drying Apparatus, Wafer Processing System Including the Same, and Wafer Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124203162025
Substrate Processing Apparatus and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124227542025
Substrate Processing Apparatus, Semiconductor Manufacturing Equipment, and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US123082552025
Apparatus and Method for Drying Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122781332025
Substrate Transferring Unit, Substrate Processing Apparatus, and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122256342025
Substrate Heating Apparatus and Method for Processing a Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122164082025
Apparatus for Drying Wafer and Method for Drying Wafer
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122117162025
Substrate Processing Apparatus and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US121989232025
Substrate Processing Method and Substrate Processing System
Samsung Electronics Co., Ltd.
0 cites
US120573232024
Substrate Processing Method, Micropattern Forming Method, and Substrate Processing Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119643572024
Conditioner, Chemical Mechanical Polishing Apparatus Including the Same and Method of Manufacturing a Semiconductor Device Using the Apparatus
Samsung Electronics Co., Ltd.
0 cites
US119357722024
Apparatus for Processing a Substrate
Samsung Electronics Co., Ltd.
0 cites
US118814262024
Substrate Transferring Unit, Substrate Processing Apparatus, and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117988012023
Apparatus Including Light Source Supplying Light to Wafer and Window Protector Receiving a Portion of Chemical Liquid
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116544582023
Substrate-cleaning Apparatus Having Tiltable Roll Brush
Samsung Electronics Co., Ltd.
0 cites
US116462032023
Thin Film Formation Apparatus and Method Using Plasma
Samsung Electronics Co., Ltd.
0 cites
US116401152023
Substrate Processing Apparatus, Semiconductor Manufacturing Equipment, and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US116107882023
Process Chamber and Substrate Processing Apparatus Including the Same
Samsung Electronics Co., Ltd.
0 cites
US115906282023
Rotary Body Module and Chemical Mechanical Polishing Apparatus Having the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites