Patents/Inventors

Kunlun Bai

Campbell, CAUS6 patents

6 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US124501162025
Method and Apparatus for Detecting Application Freezing Problem, and Device and Storage Medium
BEIJING BYTEDANCE NETWORK TECHNOLOGY CO., Ltd.
0 cites
US124061972025
Prediction and Metrology of Stochastic Photoresist Thickness Defects
KLA Corporation
0 cites
US119661562024
Lithography Mask Repair by Simulation of Photoresist Thickness Evolution
KLA Corporation
0 cites