Patents/Inventors

Kuniyasu Sakashita

OshuJP8 patents

4 Patents

US126181512026
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119938482024
Gas Nozzle, Substrate Processing Apparatus, and Substrate Processing Method
Tokyo Electron Limited
0 cites
US118850242024
Gas Introduction Structure and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118592852024
Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites