Patents/Inventors

Krishna P. Murella

Phoenix, AZUS5 patents

6 Patents

US122343832025
Low Dishing Oxide CMP Polishing Compositions for Shallow Trench Isolation Applications and Methods of Making Thereof
Versum Materials US, LLC
0 cites
US120915812024
High Oxide Film Removal Rate Shallow Trench (STI) Chemical Mechanical Planarization (CMP) Polishing
Versum Materials US, LLC
0 cites
US116921102023
Low Oxide Trench Dishing Chemical Mechanical Polishing
Versum Materials US, LLC
0 cites
US116678392023
Low Oxide Trench Dishing Chemical Mechanical Polishing
Versum Materials US, LLC
0 cites
US116084512023
Shallow Trench Isolation (STI) Chemical Mechanical Planarization (CMP) Polishing with Tunable Silicon Oxide and Silicon Nitride Removal Rates
VERSUM MATERIALS US, LLC
0 cites
US115490342023
Oxide Chemical Mechanical Planarization (CMP) Polishing Compositions
VERSUM MATERIALS US, LLC
0 cites