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Krishanu Shome
Cheshire, CT
US
5 patents
5 Patents
US11971665
2024
Wafer Alignment Using Form Birefringence of Targets or Product
ASML Holding N.V.
0 cites
US11899380
2024
Apparatus for and Method of Sensing Alignment Marks
ASML Holding N.V.
0 cites
US11841628
2023
Apparatus for and Method of Sensing Alignment Marks
ASML Holding N.V.
0 cites
US11789368
2023
Lithographic Apparatus, Metrology System, and Illumination Systems with Structured Illumination
ASML Holding N.V.
0 cites
US11703771
2023
Variable Diffraction Grating
ASML Netherlands B.V.
0 cites