Patents/Inventors

Kouzou Kanagawa

KoshiJP6 patents

6 Patents

US121836132024
Substrate Processing System and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US120875992024
Substrate Processing Apparatus and Apparatus Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US120428152024
Substrate Processing Apparatus for Supplying Gas of Water Repellent Agent and Substrate Processing Method
TOKYO ELECTRON LIMITED
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US119786442024
Substrate Processing System and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117452132023
Substrate Processing Apparatus and Apparatus Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US116159712023
Substrate Processing Apparatus and Processing Liquid Concentration Method
TOKYO ELECTRON LIMITED
0 cites