Patents/Inventors

Kousuke Ohyama

JoetsuJP3 patents

3 Patents

US125541972026
Positive Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US124364622025
Positive Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US122408042025
Onium Salt, Chemically Amplified Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites