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Inventors
Kousei Ide
Koshi
JP
7 patents
6 Patents
US12557591
2026
Linearly Moving Mechanism and Method of Suppressing Particle Scattering
TOKYO ELECTRON LIMITED
0 cites
US12391472
2025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US12381102
2025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US12368069
2025
Substrate Transfer Device Including Housing Provided with Fan
TOKYO ELECTRON LIMITED
0 cites
US11978655
2024
Substrate Transfer Mechanism and Substrate Transferring Method
TOKYO ELECTRON LIMITED
0 cites
US11705359
2023
Substrate Transfer Mechanism and Substrate Transferring Method
TOKYO ELECTRON LIMITED
0 cites