Patents/Inventors

Koukichi Hiroshiro

KumamotoJP3 patents

3 Patents

US125060122025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122030212025
Substrate Processing Device and Etching Liquid
TOKYO ELECTRON LIMITED
0 cites
US117232592023
Substrate Processing Apparatus and Method of Processing Substrate
Tokyo Electron Limited
0 cites