Patents/Inventors

Kouji Ogura

KumamotoJP2 patents

3 Patents

US120681752024
Substrate Processing Apparatus, Mixing Method, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117242352023
Mixing Apparatus, Mixing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US116159712023
Substrate Processing Apparatus and Processing Liquid Concentration Method
TOKYO ELECTRON LIMITED
0 cites