Patents/Inventors

Kouichi Mizunaga

KoshiJP6 patents

7 Patents

US124630642025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122042562025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118680562024
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118429062023
Heating Treatment Apparatus and Heating Treatment Method
TOKYO ELECTRON LIMITED
0 cites
US116370352023
Substrate Processing Apparatus with Moving Device for Connecting and Disconnecting Heater Electrodes and Substrate Processing Method Thereof
TOKYO ELECTRON LIMITED
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US116005002023
Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115519452023
Substrate Processing Apparatus Including Periphery Cover Body
TOKYO ELECTRON LIMITED
0 cites