Patents/Inventors

Kota Nakano

TokyoJP1 patent

2 Patents

US120048442024
Information Acquisition Apparatus and Signal Processing Method
CANON KABUSHIKI KAISHA
0 cites
US118090892023
Control Device, Lithography Apparatus, Measurement Apparatus, Processing Apparatus, Planarizing Apparatus, and Article Manufacturing Method
Canon Kabushiki Kaisha
0 cites