Patents/Inventors

Kota Kowa

ToyamaJP1 patent

2 Patents

US122781082025
Substrate Processing Method, Method of Manufacturing Semiconductor Device, Non- Transitory Computer-readable Recording Medium and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US121702062024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites