Patents/Inventors

Kosa Hirota

TokyoJP3 patents

3 Patents

US125735932026
Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US123680312025
Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US121547652024
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites