Patents/Inventors

Koriakin Anton

Cheonan-siKR4 patents

3 Patents

US125884522026
Substrate Processing Apparatus and Method Thereof
SEMES CO., Ltd.
0 cites
US125753582026
Flow Resistance Generating Unit and Substrate Treating Apparatus Including the Same
SEMES CO., Ltd.
0 cites
US119232162024
Apparatus and Method for Treating Substrate Including Process Chambers and Transfer Chamber
SEMES CO., Ltd.
0 cites