Korehito Kato

6 Patents

• US124101122025

  Purification Method for Fluoroolefin Having Structure of =CF 2 or =CHF, High-purity Fluoroolefin, and Production Method Therefor

  KANTO DENKA KOGYO CO., Ltd.

  0 cites
• US118145612023

  Dry Etching Gas Composition Comprising Sulfur-containing Fluorocarbon Compound Having Unsaturated Bond and Dry Etching Method Using the Same

  KANTO DENKA KOGYO CO., Ltd.

  0 cites
• US118147262023

  Dry Etching Method or Dry Cleaning Method

  KANTO DENKA KOGYO CO., Ltd.

  0 cites
• US117953962023

  Dry Etching Gas Composition Comprising Sulfur-containing Fluorocarbon Compound Having Unsaturated Bond and Dry Etching Method Using the Same

  KANTO DENKA KOGYO CO., Ltd.

  0 cites
• US117953972023

  Dry Etching Gas Composition Comprising Sulfur-containing Fluorocarbon Compound and Dry Etching Method Using the Same

  KANTO DENKA KOGYO CO., Ltd.

  0 cites
• US115849892023

  Dry Etching Method or Dry Cleaning Method

  KANTO DENKA KOGYO CO., Ltd.

  0 cites