Koos Van Berkel

6 Patents

• US125911782026

  Method for Adjusting a Patterning Process

  ASML NETHERLANDS B.V.

  0 cites
• US125608722026

  Vacuum Sheet Bond Fixturing and Flexible Burl Applications for Substrate Tables

  ASML Netherlands B.V.

  0 cites
• US123395922025

  Method for Thermo-mechanical Control of a Heat Sensitive Element and Device for Use in a Lithographic Production Process

  ASML Netherlands B.V.

  0 cites
• US122769182025

  Method and Apparatus for Calculating a Spatial Map Associated with a Component

  ASML Netherlands B.V.

  0 cites
• US122355922025

  Object Holder, Electrostatic Sheet and Method for Making an Electrostatic Sheet

  ASML NETHERLANDS B.V.

  0 cites
• US121971392025

  Object Holder, Tool and Method of Manufacturing an Object Holder

  ASML NETHERLANDS B.V.

  0 cites