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Inventors
Konstantin Tsigutkin
Eindhoven
NL
2 patents
3 Patents
US12326407
2025
Inspection Apparatus and Inspection Method
ASML NETHERLANDS B.V.
0 cites
US11692948
2023
Inspection Apparatus and Inspection Method
ASML NETHERLANDS B.V.
0 cites
US11635700
2023
Method and Apparatus for EUV Mask Inspection
0 cites