8 Patents
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- US124697262025Semiconductor Processing Device and Semiconductor Processing System
SAMSUNG ELECTRONICS CO., Ltd.
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- US122647472025Loadlock Apparatus and Substrate Processing Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
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- US122179842025Wafer Processing Apparatus Including EFEM and Method of Processing Wafer
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US118043932023Wafer Processing Apparatus Including Equipment Front End Module (EFEM) and Wafer Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
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