Patents/Inventors

Koki Tanaka

MiyagiJP13 patents

12 Patents

US125801542026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125818832026
Etching Method and Plasma Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125639872026
Plasma Processing Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites
US124943542025
Substrate Processing System, Information Processing Apparatus, and Information Processing Method for Dynamic Control of Substrate Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US124008632025
Method for Etching for Semiconductor Fabrication
TOKYO ELECTRON LIMITED
0 cites
US123883242025
Rotating Electrical Machine
AISIN CORPORATION
0 cites
US123680502025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US123548372025
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123548532025
Etching Method and Plasma Etching Apparatus
Tokyo Electron Limited
0 cites
US123476512025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120726932024
Analysis Device and Analysis Method
TOKYO ELECTRON LIMITED
0 cites
US116370202023
Etching Method and Plasma Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites