Patents/Inventors

Koji Kagawa

KumamotoJP12 patents

8 Patents

US126221932026
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125060122025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122030212025
Substrate Processing Device and Etching Liquid
TOKYO ELECTRON LIMITED
0 cites
US120209432024
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118759912024
Substrate Treatment Method and Substrate Treatment Device
TOKYO ELECTRON LIMITED
0 cites
US116262942023
Substrate Processing Method, Substrate Processing Apparatus and Recording Medium
TOKYO ELECTRON LIMITED
0 cites
US115519312023
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium Storing Program for Executing Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115519412023
Substrate Cleaning Method
TOKYO ELECTRON LIMITED
0 cites