Patents/Inventors

Koji Akiyama

Nirasaki CityJP7 patents

5 Patents

US125989262026
Method of Forming Conductive Member and Method of Forming Channel
Tokyo Electron Limited
0 cites
US125385042026
Film Formation Method
Tokyo Electron Limited
0 cites
US124068622025
Vacuum Processing Apparatus and Oxidizing Gas Removal Method
Tokyo Electron Limited
0 cites
US123494342025
Manufacturing Method for Semiconductor Device
TOKYO ELECTRON LIMITED
0 cites
US122477682025
Electrocaloric Effect Element, Heat Transfer Device, Semiconductor Manufacturing Device, and Electrocaloric Effect Element Control Method
Tokyo Electron Limited
0 cites