11 Patents
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- US122305002025Method of Manufacturing a Beta-ga 2 O 3 -based Single Crystal Film by Flowing a Ga Chloride Gas, an Oxygen Gas, and a Dopant Gas
Novel Crystal Technology, Inc.
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- US119820162024Method for Growing Beta-ga 2 O 3 -based Single Crystal Film, and Crystalline Layered Structure
National University Corporation Tokyo University Of Agriculture And Technology
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