Patents/Inventors

Kohei Otsuki

MiyagiJP2 patents

3 Patents

US122179432025
Substrate Processing Apparatus and Electrostatic Chuck
TOKYO ELECTRON LIMITED
0 cites
US118624362024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115667282023
Flexible Pipe and Temperature Control System
TOKYO ELECTRON LIMITED
0 cites