Patents/Inventors

Klaus Martin Hummler

San Diego, CAUS4 patents

5 Patents

US123895192025
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US122874552025
Oxygen-loss Resistant Top Coating for Optical Elements
ASML Netherlands B.V.
0 cites
US121710532024
System for Monitoring a Plasma
ASML Netherlands B.V.
0 cites
US118468872023
Prolonging Optical Element Lifetime in an EUV Lithography System
ASML Netherlands B.V.
0 cites
US118222522023
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites