Klaus Gwosch

5 Patents

• US124929632025

  Method for Determining an Imaging Quality of an Optical System When Illuminated by Illumination Light Within an Entrance Pupil to Be Measured

  Carl Zeiss SMT GmbH

  0 cites
• US124227432025

  Method for Measuring a Reflectivity of an Object for Measurement Light and Metrology System for Carrying Out the Method

  Carl Zeiss SMT GmbH

  0 cites
• US123724312025

  Method for Determining an Imaging Quality of an Optical System When Illuminated by Illumination Light Within a Pupil to Be Measured

  Carl Zeiss SMT GmbH

  0 cites
• US121587032024

  Method for Reproducing a Target Wavefront of an Imaging Optical Production System, and Metrology System for Carrying Out the Method

  Carl Zeiss SMT GmbH

  0 cites
• US117969262023

  Metrology System for Examining Objects with EUV Measurement Light

  Carl Zeiss SMT GmbH

  0 cites