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Inventors
Klaas P. Boonstra
Almere
NL
1 patent
2 Patents
US12412759
2025
Substrate Processing Apparatus, Reactor Mover for Moving a Reactor of the Apparatus and Method of Maintaining the Reactor of the Apparatus
ASM IP Holding B.V.
0 cites
US11993847
2024
Injector
ASM IP Holding B.V.
0 cites