Kiyki-shiy N Shang

4 Patents

• US125371792026

  Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring

  Applied Materials, Inc.

  0 cites
• US123173782025

  Multi-zone Heater Control for Wafer Processing Equipment

  Applied Materials, Inc.

  0 cites
• US115865732023

  Distributed Input/output (IO) Control and Interlock Ring Architecture

  Applied Materials, Inc.

  0 cites
• US115453462023

  Capacitive Sensing Data Integration for Plasma Chamber Condition Monitoring

  Applied Materials, Inc.

  0 cites