2 Patents
- US121533472024Organically Modified Metal Oxide Nanoparticle, Method for Producing the Same, EUV Photoresist Material, and Method for Producing Etching Mask
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites - US117477242023Organically Modified Metal Oxide Nanoparticles, Organically Modified Metal Oxide Nanoparticles-containing Solution, Organically Modified Metal Oxide Nanoparticles-containing Resist Composition, and Resist Pattern Forming Method
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
0 cites