Patents/Inventors

Kiwamu Ito

YamanashiJP2 patents

3 Patents

US124696942025
Film Forming Method
Tokyo Electron Limited
0 cites
US121318892024
Plasma Generating Apparatus, Plasma Processing Apparatus, and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116948902023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites