Patents/Inventors

Kirubanandan Naina Shanmugam

BangaloreIN4 patents

4 Patents

US125460032026
Atomic Layer Deposition Part Coating Chamber
Applied Materials Inc.
0 cites
US124865712025
Atomic Layer Deposition Coating System for Inner Walls of Gas Lines
APPLIED MATERIALS, Inc.
0 cites
US120740102024
Atomic Layer Deposition Part Coating Chamber
APPLIED MATERIALS, Inc.
0 cites
US118482182023
Semiconductor Chamber Component Cleaning Systems
Applied Materials, Inc.
0 cites