Patents/Inventors

Kippei Sugita

MiyagiJP4 patents

5 Patents

US121989542025
Execution Device and Execution Method
Tokyo Electron Limited
0 cites
US118697522024
System and Method for Transferring a Focus Ring Into Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118173352023
Method and System for Inspecting Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117354022023
Measurement Method and Measurement Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116040972023
Calibration Method and Calibration System
TOKYO ELECTRON LIMITED
0 cites