Patents/Inventors

Ki Hun Seong

Anyang-siKR2 patents

3 Patents

US123796542025
Pellicle for Extreme Ultraviolet Lithography
Korea Electronics Technology Institute
0 cites
US122822502025
Pellicle for Extreme Ultraviolet Lithography Based on Yttrium
KOREA ELECTRONICS TECHNOLOGY INSTITUTE
0 cites
US119278812024
Pellicle for Extreme Ultraviolet Lithography Based on Yttrium Carbide
Korea Electronics Technology Institute
0 cites