Patents/Inventors

Kevin R. Anglin

Somerville, MAUS4 patents

4 Patents

US121911172025
Compact Low Angle Ion Beam Extraction Assembly and Processing Apparatus
Applied Materials, Inc.
0 cites
US121069432024
Substrate Halo Arrangement for Improved Process Uniformity
Applied Materials, Inc.
0 cites
US116641932023
Temperature Controlled/electrically Biased Wafer Surround
Applied Materials, Inc.
0 cites
US116462132023
Multi-zone Platen Temperature Control
Applied Materials, Inc.
0 cites