Patents/Inventors

Kevin M. Mclaughlin

Sherwood, ORUS2 patents

3 Patents

US123004892025
UV Cure for Local Stress Modulation
Lam Research Corporation
0 cites
US120875732024
Modulation of Oxidation Profile for Substrate Processing
Lam Research Corporation
0 cites
US120805922024
Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling
Lam Research Corporation
0 cites