Patents/Inventors

Kevin Li Gu

Mountain View, CAUS11 patents

3 Patents

US126019742026
Bake Strategies to Enhance Lithographic Performance of Metal-containing Resist
Lam Research Corporation
0 cites
US125851842026
Photoresist with Multiple Patterning Radiation-absorbing Elements And/or Vertical Composition Gradient
Lam Research Corporation
0 cites
US124364642025
Pre-exposure Photoresist Curing to Enhance EUV Lithographic Performance
Lam Research Corporation
0 cites