3 Patents
- US122887052025FIB-SEM 3D Tomography for Measuring Shape Deviations of HAR Structures
Carl Zeiss SMT GmbH
0 cites - US122835042025Contact Area Size Determination Between 3D Structures in an Integrated Semiconductor Sample
Carl Zeiss SMT GmbH
0 cites - US119159082024Method for Measuring a Sample and Microscope Implementing the Method
Carl Zeiss SMT GmbH
0 cites