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Kerstin Hild
Waldstetten
DE
4 patents
4 Patents
US12546921
2026
Mirror Assembly and Optical Assembly Comprising Same
CARL ZEISS SMT GmbH
0 cites
US12411417
2025
Projection Objective Including an Optical Device
Carl Zeiss SMT GmbH
0 cites
US12276917
2025
Mirror, in Particular for Microlithography
CARL ZEISS SMT GmbH
0 cites
US12210289
2025
Mirror, in Particular for a Microlithographic Projection Exposure Apparatus
CARL ZEISS SMT GmbH
0 cites