5 Patents
- 0 cites
- US119406182024Micromechanical Component and Method for Producing a Micromechanical Component
ROBERT BOSCH GmbH
0 cites - US119125652024Micromechanical Sensor Unit and Method for Manufacturing a Micromechanical Sensor Unit
ROBERT BOSCH GmbH
0 cites - US118404452023MEMS Sensor Including a Diaphragm and Method for Manufacturing a MEMS Sensor
ROBERT BOSCH GmbH
0 cites - US117330682023Readout Signal Generator and Method for Operating a Capacitive Device
ROBERT BOSCH GmbH
0 cites