Patents/Inventors

Kentaro Asakura

YamanashiJP3 patents

4 Patents

US124380332025
Substrate Placing Method and Substrate Placing Mechanism
Tokyo Electron Limited
0 cites
US120947532024
Stage Device and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117742982023
Multi-point Thermocouples and Assemblies for Ceramic Heating Structures
TOKYO ELECTRON LIMITED
0 cites
US116642662023
Substrate Processing Apparatus and Substrate Delivery Method
TOKYO ELECTRON LIMITED
0 cites