Patents/Inventors

Kenta Kasamatsu

ToyamaJP2 patents

2 Patents

US125460022026
Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US123449352025
Substrate Processing Apparatus, Heat Insulator Assembly and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites