Patents/Inventors

Kensuke Shinohara

KyotoJP1 patent

2 Patents

US124761242025
Substrate Processing Condition Setting Method, Substrate Processing Method, Substrate Processing Condition Setting System, and Substrate Processing System
SCREEN Holdings Co., Ltd.
0 cites
US121762152024
Substrate Processing Apparatus, Substrate Processing Method, and Non-transitory Computer-readable Storage Medium
SCREEN Holdings Co., Ltd.
0 cites