Patents/Inventors

Kensuke Demura

KanagawaJP10 patents

11 Patents

US124725342025
Substrate Processing Apparatus
SHIBAURA MECHATRONICS CORPORATION
0 cites
US122781202025
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US121658862024
Substrate Processing Apparatus and Substrate Processing Method
SHIBAURA MECHATRONICS CORPORATION
0 cites
US121386712024
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US121095972024
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US120975412024
Substrate Processing Apparatus
SHIBAURA MECHATRONICS CORPORATION
0 cites
US120740552024
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US120054822024
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US119488122024
Cooling Device, Substrate Treatment Device, Cooling Method, and Substrate Treatment Method
SHIBAURA MECHATRONICS CORPORATION
0 cites
US117840402023
Substrate Treatment Device
SHIBAURA MECHATRONICS CORPORATION
0 cites
US116094912023
Reflective Mask Cleaning Apparatus and Reflective Mask Cleaning Method
SHIBAURA MECHATRONICS CORPORATION
0 cites