Patents/Inventors

Kensaku Narushima

YamanashiJP6 patents

6 Patents

US125842202026
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US124630412025
Method and Apparatus for Forming Ruthenium Silicide Film on Surface of Substrate
Tokyo Electron Limited
0 cites
US119843192024
Substrate Processing Method and Film Forming System
TOKYO ELECTRON LIMITED
0 cites
US118735562024
Raw Material Supply Apparatus and Film Forming Apparatus
Tokyo Electron Limited
0 cites
US117537192023
Flow Rate Control Method, Flow Rate Control Device, and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116294042023
Method of Forming Tungsten Film and Controller
TOKYO ELECTRON LIMITED
0 cites