Patents/Inventors

Kenji Yaegashi

TochigiJP1 patent

2 Patents

US124812282025
Object Alignment Method, Imprint Method, Article Manufacturing Method, Detection Apparatus, Imprint Apparatus, Mold, and Substrate
Canon Kabushiki Kaisha
0 cites
US116733132023
Imprint Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites